Handbook of Silicon Based MEMS Materials and Technologies Micro and Nano Technologies | 2 Edition

Compare Textbook Prices for Handbook of Silicon Based MEMS Materials and Technologies Micro and Nano Technologies 2 Edition ISBN 9780323299657 by Tilli, Markku,Paulasto-Kröckel, Mervi,Motooka, Teruaki,Lindroos, Veikko
Authors: Tilli, Markku,Paulasto-Kröckel, Mervi,Motooka, Teruaki,Lindroos, Veikko
ISBN:0323299652
ISBN-13: 9780323299657
List Price: $233.90 (up to 57% savings)
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Details about Handbook of Silicon Based MEMS Materials and Technologies Micro and Nano Technologies:

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS.

The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components.

Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.



  • Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques
  • Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs
  • Discusses properties, preparation, and growth of silicon crystals and wafers
  • Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures
  • Geared towards practical applications rather than theory

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Hi my name is Santanu, I have a master's degree in applied mathematics from Trinity College(Dublin Ireland) ,with a minor in chemistry and physics. I am a CRLA ( College Reading and Learning Association) certified tutor and held the position of head math and science tutor at Oakland Community College. I have several years of experience in tutoring chemistry, math and physics. I have tutored students ranging from elementary school level to college level. My teaching style involves detailed explan ... Read more

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